Izindaba Zemboni: I-PVA TePla kanye ne-Fraunhofer IISB basungula i-Joint Lab ye-aluminium nitride substrates

I-Fraunhofer IISB (Institute for Integrated Systems and Device Technology) ese-Erlangen kanye nomkhiqizi wezinhlelo ze-plasma ze-microwave kanye ne-radio frequency PVA TePla AG baseWettenberg bahlanganisa ubuchwepheshe babo kwi-Joint Lab yokukhiqiza amakristalu e-aluminium nitride (AlN).

Njengokuqala eYurophu, lobu budlelwano buvumela ukukhiqizwa okuncane okusekelwa yizimboni kwezingxenye ze-AlN ezi-monocrystalline ezinobubanzi obungamasentimitha angu-2 ngezinhloso ze-R&D. Lokhu kuthuthukisa kakhulu ukutholakala kwezingxenye ze-AlN eYurophu, okusheshisa ukuthuthukiswa kwamadivayisi nezinhlelo ezisekelwe ku-AlN kanye nokushintshela kwazo ezisetshenzisweni zezimboni.

I-aluminium nitride ingenye yezinto ezithembisayo kakhulu esizukulwaneni esilandelayo sama-electronics asebenza kahle kakhulu. Njenge-semiconductor ye-ultrawide-bandgap (UWBG), i-AlN ivula amathuba amasha kuma-photonics, ama-electronics anamandla, ama-electronics avame kakhulu, kanye nama-electronics asebenza ngaphansi kwezimo ezimbi kakhulu. Kuze kube manje, ukushoda kwama-substrate e-AlN asezingeni eliphezulu, anendawo enkulu futhi angabizi kakhulu kuye kwabambezela ukuthuthukiswa kwezinhlelo ze-electronic ezisekelwe ku-AlN.

“Nge-Joint Lab, sibeka isisekelo sokuqinisekisa ukutholakala okuthembekile kwezingxenye ze-AlN ezivela eYurophu, ngaleyo ndlela sivula amathuba amasha esizukulwaneni esilandelayo samadivayisi e-AlN asebenza kahle kakhulu,” kusho uDkt. Sven Besendörfer, umholi weqembu lezinto ze-nitride futhi ophethe ukuthuthukiswa kwezinto ze-AlN kwaFraunhofer IISB. “Sikanye ne-PVA TePla, sinikela ngobuchwepheshe bethu ekukhuleni kwamakristalu ezimboni, ngaleyo ndlela sidala izidingo zokudluliselwa kwezicelo eziqondile.”

Ubuchwepheshe bemishini obufakazelwe buhlangabezana nolwazi lwenqubo oluyimfihlo

Elabhorethri elihlangene, i-Fraunhofer IISB isebenzisa ubuchwepheshe bayo benqubo ye-PVT (physical vapor transport) ukukhiqiza amakristalu amakhulu e-AlN angamasentimitha angu-2. Kule nqubo, i-AlN powder ifakwa emshinini wokuphehla emazingeni okushisa angaphezu kuka-2000°C bese ifakwa kukristalu wembewu. I-PVA TePla inikeza izinhlelo ze-PVT zale njongo, esezisetshenziswa emhlabeni wonke kumakristalu e-silicon carbide (SiC) angamasentimitha angu-8 ububanzi futhi manje sezilungiselelwe ngokukhethekile ukukhula kwamakristalu e-AlN angamasentimitha angu-2.

Ngenxa yobuchwepheshe benqubo obunikezwe yiFraunhofer IISB, ithimba le-PVA TePla lakwazi ngokushesha ukukhiqiza amakristalu e-AlN anekhwalithi efanayo ezindaweni zalo. I-Joint Lab igxile ekukhiqizweni okuncane okuzinzile kwamakristalu e-AlN angamasentimitha angu-2. Ukukhiqizwa manje kukhushulwa kancane kancane ukuze kuthuthukiswe ngokuhlelekile ukuzinza kwenqubo, ukuphindaphindwa, isivuno kanye nezakhiwo zezindleko.

“Nge-aluminium nitride, sibumba ngenkuthalo isizukulwane esilandelayo sobuchwepheshe esilandela i-SiC,” kusho uDkt. Jan Pfeiffer, iphini likamongameli we-R&D kwa-PVA TePla. “Nge-Joint Lab, singahlanganisa ngqo ubuchwepheshe bethu bemishini nolwazi lwenqubo lwe-Fraunhofer IISB, okusenza sikwazi ukunikeza izixazululo ezigxile emakethe kumakhasimende ethu omhlaba wonke esiteji sokuqala,” enezela. “Umgomo wethu ohlanganyelwe ukukhuthaza intuthuko yemakethe emkhakheni we-AlN ngokusebenzisa ama-substrate afanele nokusekela izinkampani ezifuna ukungena kulo mkhakha njengabalingani bezobuchwepheshe nemishini efanele kanye nobuchwepheshe benqubo obuhambisanayo.”

Ukuqinisa ubukhosi bezobuchwepheshe baseYurophu ngokukhulisa izimboni

Amakristalu e-AlN akhiqizwa ku-Joint Lab acutshungulwa kabanzi e-Fraunhofer IISB abe yi-substrate ye-AlN ekulungele i-epi futhi, ngenkampani yocwaningo nokuthuthukiswa komkhiqizo ese-Erlangen i-LZE GmbH, idluliselwa ngqo ezinqubweni zokuthuthukiswa kwezimboni kanye nokukhulisa. “Ngenxa yobukhosi be-semiconductor yaseYurophu, kubalulekile ukuthi izinto ezintsha ezibalulekile zingathuthukiswa kuphela kodwa futhi zidluliselwe ngokushesha ezicelweni zezimboni kanye nokudalwa kwenani elilinganiswayo,” kusho umqondisi ophethe we-LZE uDkt Christian Forster. “Ngemakethe yayo yobuchwepheshe obusezingeni eliphezulu, i-LZE GmbH inikeza izinkampani nezikhungo zocwaningo ukufinyelela okuhlukile nokuvulekile emhlabeni wonke kuma-substrate e-AlN. Ngale ndlela, sisiza ekuqinisekiseni ukuthi izicelo ezithembisayo zezimakethe zezimboni ezinomthamo omkhulu zilethwa emakethe ngokushesha.”